Cite
MLA Citation
Ayse Sünbül et al.. “Impact of Ferroelectric Layer Thickness on Reliability of Back‐End‐of‐Line‐Compatible Hafnium Zirconium Oxide Films.” Advanced engineering materials, vol. 25, no. 4, 2023, p. n/a. http://access.bl.uk/ark:/81055/vdc_100179401686.0x00002c