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HARVARD Citation
Sünbül, A. et al. (2023). Impact of Ferroelectric Layer Thickness on Reliability of Back‐End‐of‐Line‐Compatible Hafnium Zirconium Oxide Films. Advanced engineering materials. 25 (4), p. n/a. [Online].
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Sünbül, A. et al. (2023). Impact of Ferroelectric Layer Thickness on Reliability of Back‐End‐of‐Line‐Compatible Hafnium Zirconium Oxide Films. Advanced engineering materials. 25 (4), p. n/a. [Online].