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APA Citation
Shi, Z., Hsiao, Y., Wang, S., & Tien, W. (2023). inOx Doped SnO2 Nanostructure Deposited on MEMS Device by PE-ALD Process for Detection of NO2. Journal of the Electrochemical Society, 170(2), . http://access.bl.uk/ark:/81055/vdc_100179397117.0x000064