Cite
MLA Citation
Junmo Koo et al.. “Evaluating mechanical properties of 100nm-thick atomic layer deposited Al2O3 as a free-standing film.” Scripta materialia, 2020, pp. 256–261. http://access.bl.uk/ark:/81055/vdc_100105148727.0x000014
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Junmo Koo et al.. “Evaluating mechanical properties of 100nm-thick atomic layer deposited Al2O3 as a free-standing film.” Scripta materialia, 2020, pp. 256–261. http://access.bl.uk/ark:/81055/vdc_100105148727.0x000014