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HARVARD Citation
Cho, S. et al. (2023). Two-step growth of κ-Ga2O3 thin films on 4H-SiC substrates with temperature-varied buffer layers using mist chemical vapor deposition. Japanese journal of applied physics. p. . [Online].
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Cho, S. et al. (2023). Two-step growth of κ-Ga2O3 thin films on 4H-SiC substrates with temperature-varied buffer layers using mist chemical vapor deposition. Japanese journal of applied physics. p. . [Online].