Cite
HARVARD Citation
Porret, C. et al. (2018). (Invited) Very Low Temperature Epitaxy of Group-IV Semiconductors for Use in FinFET, Stacked Nanowires and Monolithic 3D Integration. ECS transactions. pp. 163-175. [Online].
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Porret, C. et al. (2018). (Invited) Very Low Temperature Epitaxy of Group-IV Semiconductors for Use in FinFET, Stacked Nanowires and Monolithic 3D Integration. ECS transactions. pp. 163-175. [Online].