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APA Citation
Ahn, J., Kim, P. D., Hwang, S. C., Seo, J., Lee, S., Ogawa, Y., Ida, J., Sasaki, Y., Nagai, T., & Otsu, T. (2017). electrolyzed Sulfuric Acid Application in Semiconductor Cleaning Processes: An Advanced Substitution of SPM Cleaning. ECS transactions, 77, 207–212. http://access.bl.uk/ark:/81055/vdc_100116177068.0x00000f