Cite
MLA Citation
Robert D. Clark et al.. “(Invited) Process and Integration of Dielectrics Required for 10nm and Beyond Scaling.” ECS transactions, vol. 72, 2016, pp. 319–327. http://access.bl.uk/ark:/81055/vdc_100117128416.0x000024
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Robert D. Clark et al.. “(Invited) Process and Integration of Dielectrics Required for 10nm and Beyond Scaling.” ECS transactions, vol. 72, 2016, pp. 319–327. http://access.bl.uk/ark:/81055/vdc_100117128416.0x000024