Experimental verification of the of contamination reduction of silicon during electron beam melting due to the use of a gas-dynamic window. Issue 1 (February 2021)
- Record Type:
- Journal Article
- Title:
- Experimental verification of the of contamination reduction of silicon during electron beam melting due to the use of a gas-dynamic window. Issue 1 (February 2021)
- Main Title:
- Experimental verification of the of contamination reduction of silicon during electron beam melting due to the use of a gas-dynamic window
- Authors:
- Kravtsov, A
Chikvaidze, G - Abstract:
- Abstract: Metallurgical process of producing initial rods for FZ silicon single crystal application was described before. Purity of pulled ingots was satisfied, but some impurities level was over required level. Concentrations of these impurities such Fe; Cr; Cu; Al; O2 been decreased by gas dynamic window and electric trap in laboratory scale equipment. Present article described results of experiments on industry scale equipment with application gas dynamic window for purifying indicated impurities in initial rods and results received in FZ silicon single crystals, grown from that rods, for concentrations of Aluminum and Oxygen.
- Is Part Of:
- IOP conference series. Volume 1100:Issue 1(2021)
- Journal:
- IOP conference series
- Issue:
- Volume 1100:Issue 1(2021)
- Issue Display:
- Volume 1100, Issue 1 (2021)
- Year:
- 2021
- Volume:
- 1100
- Issue:
- 1
- Issue Sort Value:
- 2021-1100-0001-0000
- Page Start:
- Page End:
- Publication Date:
- 2021-02
- Subjects:
- Materials science -- Periodicals
620.1105 - Journal URLs:
- http://iopscience.iop.org/1757-899X ↗
http://ioppublishing.org/ ↗ - DOI:
- 10.1088/1757-899X/1100/1/012037 ↗
- Languages:
- English
- ISSNs:
- 1757-8981
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store - Ingest File:
- 25304.xml