Cite
HARVARD Citation
Xu, G. et al. (2023). Atomic-scale surface of fused silica induced by chemical mechanical polishing with controlled size spherical ceria abrasives. Journal of manufacturing processes. pp. 783-792. [Online].
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Xu, G. et al. (2023). Atomic-scale surface of fused silica induced by chemical mechanical polishing with controlled size spherical ceria abrasives. Journal of manufacturing processes. pp. 783-792. [Online].