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MLA Citation
S Purohit et al.. “Wet bulk micromachining characteristics of Si{110} in NaOH-based solution.” Journal of micromechanics and microengineering, vol. 32, 2022, p. . http://access.bl.uk/ark:/81055/vdc_100169530672.0x00004d
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S Purohit et al.. “Wet bulk micromachining characteristics of Si{110} in NaOH-based solution.” Journal of micromechanics and microengineering, vol. 32, 2022, p. . http://access.bl.uk/ark:/81055/vdc_100169530672.0x00004d