Cite
MLA Citation
Gagan Srivastava and C. Fred Higgs. “An Industrial-Scale, Multi-Wafer CMP Simulation Using the PAML Modeling Approach.” ECS journal of solid state science and technology, vol. 4, 2015, pp. P5088–P5096. http://access.bl.uk/ark:/81055/vdc_100160139943.0x000008