Cite
MLA Citation
L. Peckler et al.. “Real-Time Shear and Normal Force Trends in Tungsten Chemical Mechanical Planarization with Different Conditioning Discs.” ECS journal of solid state science and technology, vol. 7, 2018, pp. P221–P227. http://access.bl.uk/ark:/81055/vdc_100160139699.0x000013