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MLA Citation
E. Beche et al.. “Direct Bonding Mechanism of ALD-Al2O3 Thin Films.” ECS journal of solid state science and technology, vol. 4, 2015, pp. P171–P175. http://access.bl.uk/ark:/81055/vdc_100160139155.0x000002
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E. Beche et al.. “Direct Bonding Mechanism of ALD-Al2O3 Thin Films.” ECS journal of solid state science and technology, vol. 4, 2015, pp. P171–P175. http://access.bl.uk/ark:/81055/vdc_100160139155.0x000002