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HARVARD Citation
Araki, K. et al. (2015). Impact of Rapid Thermal Oxidation at Ultrahigh-Temperatures on Oxygen Precipitation Behavior in Czochralski-Silicon Crystals III. ECS Solid State Letters. pp. P63-P65. [Online].
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Araki, K. et al. (2015). Impact of Rapid Thermal Oxidation at Ultrahigh-Temperatures on Oxygen Precipitation Behavior in Czochralski-Silicon Crystals III. ECS Solid State Letters. pp. P63-P65. [Online].