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APA Citation
Zhang, X., Gillot, C., Zhao, L., Ryan, E. T., & Wu, C. (2015). communication—The Impact of TaN Barrier Processes on Different Ultra Low-k Dielectrics. ECS journal of solid state science and technology, 4, N160–N162. http://access.bl.uk/ark:/81055/vdc_100160133802.0x00000e