Cite
MLA Citation
C. Porret et al.. “Very Low Temperature Epitaxy of Group-IV Semiconductors for Use in FinFET, Stacked Nanowires and Monolithic 3D Integration.” ECS journal of solid state science and technology, vol. 8, 2019, pp. P392–P399. http://access.bl.uk/ark:/81055/vdc_100160133648.0x000005