A 10 × 10 deep ultraviolet light-emitting micro-LED array. (1st June 2022)

• Record Type: Journal Article
• Authors: Yu, Huabin; Memon, Muhammad Hunain; Jia, Hongfeng; Zhang, Haochen; Tian, Meng; Fang, Shi; Wang, Danhao; Kang, Yang; Xiao, Shudan; Long, Shibing; Sun, Haiding
• Is Part Of: Journal of semiconductors. Volume 43:Number 6(2022)
• Publication Date: 2022-06-01
• Subjects: AlGaN -- deep ultraviolet -- micro-LED array -- light extraction efficiency; Semiconductors -- Periodicals; 621.38152
• DOI: 10.1088/1674-4926/43/6/062801
• Languages: English
• ISSNs: 1674-4926

Abstract

Abstract: In this work, we design and fabricate a deep ultraviolet (DUV) light-emitting array consisting of 10 × 10 micro-LEDs ( μ -LEDs) with each device having 20 μ m in diameter. Strikingly, the array demonstrates a significant enhancement of total light output power by nearly 52% at the injection current of 100 mA, in comparison to a conventional large LED chip whose emitting area is the same as the array. A much higher (~22%) peak external quantum efficiency, as well as a smaller efficiency droop for μ -LED array, was also achieved. The numerical calculation reveals that the performance boost can be attributed to the higher light extraction efficiency at the edge of each μ -LED. Additionally, the far-field pattern measurement shows that the μ -LED array possesses a better forward directionality of emission. These findings shed light on the enhancement of the DUV LEDs performance and provide new insights in controlling the light behavior of the μ -LEDs.