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APA Citation
Kim, Y. W., Lee, D. G., Moon, S., Ku, C. M., Cho, J. H., & Ahn, J. (2022). actinic patterned mask imaging using extreme ultraviolet ptychography microscope with high harmonic generation source. Applied physics express, 15, . http://access.bl.uk/ark:/81055/vdc_100158587848.0x000006