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APA Citation
Fang, J., Yang, T., Cheng, Y., & Chen, G. (2021). (3-Aminopropyl)trimethoxysilane Self-Assembled Monolayer as Barrier of Porous SiOCH for Electroless Cu Metallization: Optimizations of SiOCH Hydroxylation and Monolayer Functionalization. ECS journal of solid state science and technology, 10, . http://access.bl.uk/ark:/81055/vdc_100120462545.0x000003