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APA Citation
Lv, S., Zhu, Z., Long, F., Sun, H., Song, C., Zhang, A., Tan, F., & Zhao, J. (2022). characterization analysis of quality factor, electro-mechanical coupling and spurious modes for AlN Lamb-wave resonators with fs> 2 GHz. Microelectronics journal, 125, . http://access.bl.uk/ark:/81055/vdc_100156435011.0x00004f