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APA Citation
Kim, S., Hidayat, R., Roh, H., Kim, J., Kim, H., Khumaini, K., Park, M., Seok, J., Park, J. W., & Lee, W. (2022). atomic layer deposition of titanium oxide thin films using a titanium precursor with a linked amido-cyclopentadienyl ligand. Journal of materials chemistry, 10(17), 6696–6709. http://access.bl.uk/ark:/81055/vdc_100155046909.0x000020