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APA Citation
Kumar, R., Hazarika, J., & Venkatesh Rajaraman, P. (2022). study of potassium oxalate based slurry for Copper/Cobalt CMP. Materials today, 57, 1913–1917. http://access.bl.uk/ark:/81055/vdc_100153781985.0x00000a
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Kumar, R., Hazarika, J., & Venkatesh Rajaraman, P. (2022). study of potassium oxalate based slurry for Copper/Cobalt CMP. Materials today, 57, 1913–1917. http://access.bl.uk/ark:/81055/vdc_100153781985.0x00000a