Cite
HARVARD Citation
Feng, D. et al. (2020). Chemical Mechanical Planarization of Carbon-Doped Amorphous Ge2Sb2Te5 Film with Hydrogen Peroxide as Oxidizer in Alkaline Slurry. ECS journal of solid state science and technology. p. . [Online].
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Feng, D. et al. (2020). Chemical Mechanical Planarization of Carbon-Doped Amorphous Ge2Sb2Te5 Film with Hydrogen Peroxide as Oxidizer in Alkaline Slurry. ECS journal of solid state science and technology. p. . [Online].