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MLA Citation
Gianluca Rengo et al.. “(Invited) Highly Doped Si1-XGex Epitaxy in View of S/D Applications.” ECS transactions, vol. 98, 2020, pp. 27–36. http://access.bl.uk/ark:/81055/vdc_100110163363.0x00003c
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Gianluca Rengo et al.. “(Invited) Highly Doped Si1-XGex Epitaxy in View of S/D Applications.” ECS transactions, vol. 98, 2020, pp. 27–36. http://access.bl.uk/ark:/81055/vdc_100110163363.0x00003c