Cite
APA Citation
de Veen, P., Bos, C., Hoogstede, D., Revenberg, C., Liljeholm, J., & Ebefors, T. (2015). high-resolution X-ray computed tomography of through silicon vias for RF MEMS integrated passive device applications. Microelectronics and reliability, 55(9), 1644–1648. http://access.bl.uk/ark:/81055/vdc_100051210326.0x00005a