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HARVARD Citation
de Veen, P. et al. (2015). High-resolution X-ray computed tomography of through silicon vias for RF MEMS integrated passive device applications. Microelectronics and reliability. 55 (9), pp. 1644-1648. [Online].
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de Veen, P. et al. (2015). High-resolution X-ray computed tomography of through silicon vias for RF MEMS integrated passive device applications. Microelectronics and reliability. 55 (9), pp. 1644-1648. [Online].