Overview and analysis of MEMS Coriolis vibratory ring gyroscope. (September 2021)

• Record Type: Journal Article
• Authors: Jia, Jia; Ding, Xukai; Qin, Zhengcheng; Ruan, Zhihu; Li, Wenkai; Liu, Xuewen; Li, Hongsheng
• Is Part Of: Measurement. Volume 182(2021)
• Publication Date: 2021-09
• Subjects: Ring gyroscope -- Detection mode -- Process material -- Structural style -- Resonator characteristic -- Error suppression -- Performance improvement; Weights and measures -- Periodicals; Measurement -- Periodicals; Measurement; Weights and measures; Periodicals; 530.8
• DOI: 10.1016/j.measurement.2021.109704
• Languages: English
• ISSNs: 0263-2241

Abstract

Abstract: Micro-electromechanical systems (MEMS) Coriolis vibratory ring gyroscope, which utilizes Byran effect to detect rotation, is regarded as a two-dimensional derivative of vibrating shell gyroscope. The MEMS ring gyroscope has a symmetrical structure, higher mechanical sensitivity, better shock resistance and lower temperature sensitivity. Therefore, the ring gyroscope considered as candidates for high-performance MEMS gyroscopes. Moreover, ring resonator preparation is compatible with the recent popular MEMS process technology, which has a higher CSWaP (cost, size, weight, and power). This paper analyzes the progress of research into the MEMS ring gyroscopes. Firstly, working mechanism and different detection methods are introduced; secondly, process techniques and materials are reviewed; thirdly, structural styles of the ring resonators are reported; fourthly, characteristics of the ring resonators are analyzed; fifthly, error suppression and performance improvement strategies of the ring gyroscopes are investigated; and finally, some viewpoints and prospects of the MEMS ring gyroscopes are presented. Graphical abstract: Highlights: Fused silica is the best processing material for ring resonators. Multi-ring resonators have a significant potential for performance improvement. Ring gyroscopes are more suitable for rate mode based on n=2 wineglass mode. Compensation method for ring gyroscopes is applicable to axisymmetric gyroscopes.