Overview and analysis of MEMS Coriolis vibratory ring gyroscope. (September 2021) - Jia, Jia
Abstract: Micro-electromechanical systems (MEMS) Coriolis vibratory ring gyroscope, which utilizes Byran effect to detect rotation, is regarded as a two-dimensional derivative of vibrating shell gyroscope. The MEMS ring gyroscope has a symmetrical structure, higher mechanical sensitivity, better shock resistance and lower temperature sensitivity. Therefore, the ring gyroscope considered as candidates for high-performance MEMS gyroscopes. Moreover, ring resonator preparation is compatible with the recent popular MEMS process technology, which has a higher CSWaP (cost, size, weight, and power). This paper analyzes the progress of research into the MEMS ring gyroscopes. Firstly, working mechanism and different detection methods are introduced; secondly, process techniques and materials are reviewed; thirdly, structural styles of the ring resonators are reported; fourthly, characteristics of the ring resonators are analyzed; fifthly, error suppression and performance improvement strategies of the ring gyroscopes are investigated; and finally, some viewpoints and prospects of the MEMS ring gyroscopes are presented. Graphical abstract: Highlights: Fused silica is the best processing material for ring resonators. Multi-ring resonators have a significant potential for performance improvement. Ring gyroscopes are more suitable for rate mode based on n=2 wineglass mode. Compensation method for ring gyroscopes is applicable to axisymmetric gyroscopes.