Cite
MLA Citation
Chuying Tang et al.. “Investigation on the release of residual stress in a folded structure applied to MEMS devices.” Micro & nano letters, vol. 16, 2021, pp. 443–447. http://access.bl.uk/ark:/81055/vdc_100139609767.0x000016
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Chuying Tang et al.. “Investigation on the release of residual stress in a folded structure applied to MEMS devices.” Micro & nano letters, vol. 16, 2021, pp. 443–447. http://access.bl.uk/ark:/81055/vdc_100139609767.0x000016