Cite
HARVARD Citation
Tang, C. et al. (2021). Investigation on the release of residual stress in a folded structure applied to MEMS devices. Micro & nano letters. pp. 443-447. [Online].
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Tang, C. et al. (2021). Investigation on the release of residual stress in a folded structure applied to MEMS devices. Micro & nano letters. pp. 443-447. [Online].