Cite
HARVARD Citation
Liu, M. et al. (2021). Influence of radio frequency magnetron sputtering parameters on the structure and performance of SiC films. Ceramics international. 47 (17), pp. 24098-24105. [Online].
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Liu, M. et al. (2021). Influence of radio frequency magnetron sputtering parameters on the structure and performance of SiC films. Ceramics international. 47 (17), pp. 24098-24105. [Online].