Cite
MLA Citation
Jiangyou Long et al.. “Centimeter-scale low-damage micromachining on single-crystal 4H–SiC substrates using a femtosecond laser with square-shaped Flat-Top focus spots.” Ceramics international, vol. 47, no. 16, 2021, pp. 23134–23143. http://access.bl.uk/ark:/81055/vdc_100134865664.0x000037