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MLA Citation
X. F. Liu et al.. “A Facile Method for Heteroepitaxial Growth of Homogeneous 3C-SiC Thin Films on Both Surfaces of Suspended Si Wafer by Conventional Chemical Vapor Deposition.” ECS journal of solid state science and technology, vol. 6, 2017, pp. P27–P31. http://access.bl.uk/ark:/81055/vdc_100117116941.0x000002