Cite
HARVARD Citation
Peterson, D. et al. (2021). Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma. Plasma sources science & technology. p. . [Online].
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Peterson, D. et al. (2021). Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma. Plasma sources science & technology. p. . [Online].