Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma. (17th June 2021)

• Record Type: Journal Article
• Authors: Peterson, D; Xiao, Y; Ford, K; Kraus, P; Shannon, S
• Is Part Of: Plasma sources science & technology. Volume 30:Number 6(2021)
• Publication Date: 2021-06-17
• Subjects: electron temperature -- plasma diagnostic -- pulsed plasma -- hairpin resonator probe -- collision frequency -- microwave resonator; Plasma (Ionized gases) -- Periodicals; 530.44
• DOI: 10.1088/1361-6595/ac02b2
• Languages: English
• ISSNs: 0963-0252

Abstract

Abstract: Electron temperature is measured from time resolved hairpin resonator probe measurements in a pulsed capacitively coupled argon plasma at 400 mTorr. Effective collision frequency is related to the electron energy distribution via the effective conductivity and closes a system of equations that allow electron temperature to be determined. Results generally show good agreement with expected behavior and unfiltered time-resolved optical emission measurements.