Cite
MLA Citation
J. Lee et al.. “TiN/PECVD‐Si3N4/TiN diaphragm‐based capacitive‐type MEMS acoustic sensor.” Electronics letters, vol. 52, no. 6, 2016, pp. 468–470. http://access.bl.uk/ark:/81055/vdc_100126835852.0x00005c
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J. Lee et al.. “TiN/PECVD‐Si3N4/TiN diaphragm‐based capacitive‐type MEMS acoustic sensor.” Electronics letters, vol. 52, no. 6, 2016, pp. 468–470. http://access.bl.uk/ark:/81055/vdc_100126835852.0x00005c