Cite
HARVARD Citation
Lee, J. et al. (2016). TiN/PECVD‐Si3N4/TiN diaphragm‐based capacitive‐type MEMS acoustic sensor. Electronics letters. 52 (6), pp. 468-470. [Online].
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Lee, J. et al. (2016). TiN/PECVD‐Si3N4/TiN diaphragm‐based capacitive‐type MEMS acoustic sensor. Electronics letters. 52 (6), pp. 468-470. [Online].