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MLA Citation
Chaoyue Zhang et al.. “Study on subsurface damage mechanism of gallium nitride in nano-grinding.” Materials science in semiconductor processing, vol. 128, 2021, p. . http://access.bl.uk/ark:/81055/vdc_100126838284.0x00002e
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Chaoyue Zhang et al.. “Study on subsurface damage mechanism of gallium nitride in nano-grinding.” Materials science in semiconductor processing, vol. 128, 2021, p. . http://access.bl.uk/ark:/81055/vdc_100126838284.0x00002e