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MLA Citation
B. Xia et al.. “The carbon and hydrogen contents in ALD-grown ZnO films define a narrow ALD temperature window.” Vacuum, vol. 190, 2021, p. . http://access.bl.uk/ark:/81055/vdc_100133384353.0x000050
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B. Xia et al.. “The carbon and hydrogen contents in ALD-grown ZnO films define a narrow ALD temperature window.” Vacuum, vol. 190, 2021, p. . http://access.bl.uk/ark:/81055/vdc_100133384353.0x000050