Cite

MLA Citation

    Abid Iqbal et al.. “Pulsed DC Sputtering of Highly c‐Axis AlN Film on Top of Si (111) Substrate.” Physica status solidi, vol. 258, no. 6, 2021, p. n/a. http://access.bl.uk/ark:/81055/vdc_100132239245.0x000033
  
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