Cite
MLA Citation
Jau-Shiung Fang et al.. “Synthesis of Dilute Phosphorous-Embedded Co Alloy Films on a NiSi Substrate with a Superior Gap-Filling Capability for Nanoscale Interconnects.” Journal of the Electrochemical Society, vol. 168, no. 4, 2021, p. . http://access.bl.uk/ark:/81055/vdc_100127352928.0x000063