Cite
HARVARD Citation
Hippler, R. et al. (2021). A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge. Plasma sources science & technology. p. . [Online].
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Hippler, R. et al. (2021). A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge. Plasma sources science & technology. p. . [Online].