A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge. (8th April 2021)
- Record Type:
- Journal Article
- Title:
- A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge. (8th April 2021)
- Main Title:
- A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge
- Authors:
- Hippler, Rainer
Cada, Martin
Hubicka, Zdenek - Abstract:
- Abstract: The performance of a positively biased external ring anode in combination with a hollow cathode (HC) discharge or a magnetron sputtering (MS) discharge, both with a Ti cathode and with Ar as working gas, is investigated. Plasma and floating potential increase as function of anode voltage. Energy-resolved mass spectrometry reveals that the kinetic energy of argon and titanium ions is enhanced by a positive anode voltage allowing for an effective energy control of plasma ions.
- Is Part Of:
- Plasma sources science & technology. Volume 30:Number 4(2021)
- Journal:
- Plasma sources science & technology
- Issue:
- Volume 30:Number 4(2021)
- Issue Display:
- Volume 30, Issue 4 (2021)
- Year:
- 2021
- Volume:
- 30
- Issue:
- 4
- Issue Sort Value:
- 2021-0030-0004-0000
- Page Start:
- Page End:
- Publication Date:
- 2021-04-08
- Subjects:
- hollow cathode discharge -- magnetron sputtering discharge -- positively biased anode -- Langmuir probe diagnostics -- energy-resolved ion mass spectrometry
Plasma (Ionized gases) -- Periodicals
530.44 - Journal URLs:
- http://ioppublishing.org/ ↗
http://iopscience.iop.org/1009-0630 ↗ - DOI:
- 10.1088/1361-6595/abe0cc ↗
- Languages:
- English
- ISSNs:
- 0963-0252
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store - Ingest File:
- 16299.xml