Towards environmental friendly solution-based ZTO/AlOx TFTs. (19th January 2015)

• Record Type: Journal Article
• Authors: Branquinho, Rita; Salgueiro, Daniela; Santa, Ana; Kiazadeh, Asal; Barquinha, Pedro; Pereira, Luís; Martins, Rodrigo; Fortunato, Elvira
• Is Part Of: Semiconductor science and technology. Volume 30:Number 2(2015:Feb.)
• Publication Date: 2015-01-19
• Subjects: solution TFTs -- ZTO -- aluminum oxide -- combustion reaction -- ethanol solution synthesis; Semiconductors -- Periodicals; 621.38152
• DOI: 10.1088/0268-1242/30/2/024007
• Languages: English
• ISSNs: 0268-1242

Abstract

Abstract: Solution based deposition has been recently considered as a viable option for low-cost flexible electronics. In this context research efforts have been increasingly centred on the development of suitable solution-processed materials for oxide based transistors. Nevertheless, the majority of synthetic routes reported require the use of toxic organic solvents. In this work we report on a new environmental friendly solution combustion synthesis route, using ethanol as solvent, for the preparation of indium/gallium free amorphous zinc-tin oxide (ZTO) thin film transistors (TFTs) including AlO x gate dielectric. The decomposition of ZTO and AlO x precursor solutions, electrical characterization and stability of solution processed ZTO/AlO x TFTs under gate-bias stress, in both air and vacuum atmosphere, were investigated. The devices demonstrated low hysteresis ( ΔV = 0.23 V), close to zero turn on voltage, low threshold voltage ( V T = 0.36 V) and a saturation mobility of 0.8 cm 2 V −1 s −1 at low operation voltages. Ethanol based ZTO/AlO x TFTs are a promising alternative for applications in disposable, low cost and environmental friendly electronics.