Cite
MLA Citation
Ho Jun Kim. “Influence of the gas pressure in a Torr regime capacitively coupled plasma deposition reactor.” Plasma sources science & technology, vol. 30, 2021, p. . http://access.bl.uk/ark:/81055/vdc_100125048663.0x00003e
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Ho Jun Kim. “Influence of the gas pressure in a Torr regime capacitively coupled plasma deposition reactor.” Plasma sources science & technology, vol. 30, 2021, p. . http://access.bl.uk/ark:/81055/vdc_100125048663.0x00003e