Cite
HARVARD Citation
Volmer, F. et al. (2021). How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation. Journal of physics. p. . [Online].
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Volmer, F. et al. (2021). How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation. Journal of physics. p. . [Online].