Cite
MLA Citation
Kentaro Kawaguchi et al.. “Cooperative roles of chemical reactions and mechanical friction in chemical mechanical polishing of gallium nitride assisted by OH radicals: tight-binding quantum chemical molecular dynamics simulations.” Physical chemistry chemical physics, vol. 23, no. 7, 2021, pp. 4075–4084. http://access.bl.uk/ark:/81055/vdc_100122880569.0x00004b