Cite
APA Citation
Sekine, M., Tsutsumi, T., Fukunaga, Y., Takeda, K., Kondo, H., Ishikawa, K., & Hori, M. (2016). (Invited) Control of Internal Plasma Parameters Toward Atomic Level Processing. ECS transactions, 75, 21–24. http://access.bl.uk/ark:/81055/vdc_100117126060.0x000025