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APA Citation
Kim, S., Park, J. Y., Go, S., Kwon, H. S., Choi, W. Y., & Kim, S. (2021). a low-power nanoelectromechanical (NEM) device with Al-doped HfO2-based ferroelectric capacitor. Solid-state electronics, 175, . http://access.bl.uk/ark:/81055/vdc_100120455385.0x000058